KDT JU 2021 IA HICONNECTS
| Reference number | |
| Coordinator | Excillum AB |
| Funding from Vinnova | SEK 3 000 000 |
| Project duration | January 2023 - December 2025 |
| Status | Ongoing |
| Venture | Chips Joint Undertaking – an EU program to strengthen competitiveness in semiconductors |
Purpose and goal
Excillum´s development in the project is aimed to an X-ray source prototype with 4 W of target power at 150 nm resolution and 160 kV acceleration voltage, enabling X-ray inspection system (developed by deepXscan) with higher resolution and acceptable throughput compared to today´s state of the art.
Expected effects and result
The target group of this project developments are OEMs, end users (industry and research labs) of X-ray systems ( for metrology and other applications) integrating Excillum’s X-ray source. Opening new metrology market after successful implementation of new X-ray source after this project. The Economic impact is the continued growth of the semiconductor industry by enabling further scaling through 3D heterogeneous integration using advanced packaging techniques thanks to higher precision metrology supporting the ever-growing manufacturing challenges.
Planned approach and implementation
Month 2 - HICONNECTS Kickoff meeting Month 16 - Milstolpe: X-ray source prototype ready for evaluation Month 24 - Leverans: X-ray source prototype operational