ECSEL 2018 IA MADEin4 Excillum AB
| Reference number | |
| Coordinator | Excillum AB |
| Funding from Vinnova | SEK 9 825 833 |
| Project duration | April 2019 - March 2022 |
| Status | Completed |
| Venture | ECSEL |
Important results from the project
MADEin4, an ECSEL JU project, addressed an important challenge of the ECS technologies, more precisely the significant trade-off between the metrology sensitivity, precision and accuracy to its productivity. The project developed next generation metrology tools, machine learning methods and applications in support of Industry 4.0 high volume manufacturing in the semiconductor manufacturing industry. Excillum´s main contribution in MADEin4 was the development of the MetalJet technology for suitability in XRF application for semiconductor high volume manufacturing.
Expected long term effects
Excillum reached its project goals and delivered an enhanced performance MetalJet X-ray source prototype operating at 1000 W, a four times improvement of power relative to the X-ray source available at the start of the MADEin4 project. The results have been presented at international events relevant for the SEMI industry and are already included in Excillum’s products for different markets.
Approach and implementation
The project consisted of 47 partners working in 6 work packages, with more than half of the partners collaborating on the metrology work package where Excillum had its main task. There were several challenges posed by Covid19, but the project has been carried out in a good way. Excillum succeeded to deliver as planned one of the first main project results, which was appreciated by the project partners, coordinator, and reviewers. We have benefited of a good collaboration and coordination both, within the work package and inter work packages.