Advanced laser for industrial lithography
| Reference number | |
| Coordinator | Kungliga Tekniska Högskolan - Institutionen för tillämpad fysik |
| Funding from Vinnova | SEK 1 530 000 |
| Project duration | August 2018 - October 2022 |
| Status | Completed |
| Venture | The strategic innovation programme Electronic Components and Systems: |
| Call | Electronic components and systems. Research and innovation projects 2018. |
Important results from the project
The project aimed to develop a prototype for an energy-efficient laser for the next generation of mask writers. This type of laser is missing on the market today, and with such a laser Mycronic will be able to develop better machines with significantly lower operating costs. The laser was devel-oped by the KTH group, the prototype was built by SLF Svenska Laserfabriken AB and the proto-type was evaluated at Mycronic. We didn´t quite hit the output and noise targets, but otherwise it worked well.
Expected long term effects
We have not met the performance targets so further work is necessary. When the goals are achieved, SLF Svenska Laserfabriken AB hopes to become a supplier to Mycronic AB. In this way, they get a better product and can also save energy corresponding to approx. 30 GWh/year for its customers. These new products are estimated to give an increased annual turnover of approx.500-1000 MSEK.
Approach and implementation
The project started already at the planning stage when Mycronic realized that we had the relevant technology. Once the funding was ready, we detailed designed and built the laser. Successively, we have been able to improve its performance. The lack of good enough crystals has been the weak link and pending better the project has been delayed. Finally we packed the latest version, took it to Mycronic and did the final test. Analysis: A better non-linear crystal is needed.